The 28-year-old took part in training in Baku with the rest of the Germany squad but is yet to fully overcome the back injury that saw him miss training earlier in the week.
Germany head coach Joachim Low said of the Arsenal playmaker: “Every player is fit. The only doubt is Ozil.
“We’ll wait until after our last training session to decide on him.”
Concern over Ozil’s hamstring has also limited the German’s game-time. After first pulling up in Arsenal’s final training session before their 3-1 defeat at West Brom he also missed his country’s 1-0 friendly defeat of England on Wednesday.
Ozil has not been named among the starters for Arsenal’s last five games in league and cup, in which time Arsene Wenger has switched to a 4-3-3 that allows him to fit Granit Xhaka, Aaron Ramsey and Alex Oxlade-Chamberlain into central midfield.